2004 TEL ACT12

Wafer Size:      12

Configuration:  4C Dual Block with empty Dev. units,

L->R, Inline type,

Type #3 Main Controller

Foup x 4

R-Gen Pump

9 LHP, 6 HHP and 4 PHP, WEE, ADH, 9 CPL,

AC Power Box

Chemical Cabinets

Bulk Solvent Delivery with 20L back-up cannister

T&H

TCU