2004 TEL ACT12
2004 TEL ACT12
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Description
Wafer Size: 12
Configuration: 4C Dual Block with empty Dev. units,
L->R, Inline type,
Type #3 Main Controller
Foup x 4
R-Gen Pump
9 LHP, 6 HHP and 4 PHP, WEE, ADH, 9 CPL,
AC Power Box
Chemical Cabinets
Bulk Solvent Delivery with 20L back-up cannister
T&H
TCU
Specifications
| Manufacturer | TEL |
| Model | ACT12 |
| Year | 2004 |
| Condition | Used |
| Stock Number | BM2409 |