2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

• Part No: Enviro 1
• Date of Manufacture: 08/23/2000
• Gases Used: NF3, H2/N2, CF4 and O2

Included Components

• Main Body with Load Lock
• System Control Computer Part No: E4200
• Brooks Automation Robot Part No: 001-7600-02, VacuTran 5 VTR5
• Brooks Automation Robot Controller Part No: 001-8200-76
• Brooks Automation Teach Pendant Part No: 001-1984
• ASTeX Microwave Power Supply Part No: FI20160-1, SmartPower
• ASTeX Microwave Power Supply Part No: AX2050, ULVAC-10, 1017282
• ASTeX Precision Power Detector Waveguide Part No: FI20164
• ASTeX Magnetron Head Part No: FI20162-1
• ASTeX Magnetron Head Part No: FI20047
• ASTeX Waveguide Part No: FI20625
• ASTeX RF Match Part No: SmartMatch
• ENI Power Systems RF Generator Part No: OEM-6B-01M3
• GE Fanuc PLC System Part No: Series 90-30 (Qty. 2)
• VAT Part No: 02110-BA24-AMZ1
• Pictured Manuals and Accessories 

This Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper is used working surplus. The systems appears to be complete but this cannot be confirmed and is being sold as-is (see photos). The physical condition is good, but there are signs of previous use and handling.