2012 AMAT DFinder

Tool Status Disconnected

Wafer Size 300 mm

Fab Section Metrology

Asset Description Darkfeld Wafer Inspection Tool

Software Version 3.8.042

CIM GEM

Process Darkfeld Wafer Inspection

Hardware Configuration (fab):

Main System Main Scanner 1

Handler System Robot 1

Factory Interface FOUP 2

*Missing parts list in images*