2007 Semitool SP012F1 SSC SII

Tool Status Connected

Wafer Size 300 mm

Fab Section Clean

Asset Description Resist Strip Tool

Software Version 2.5.0.12 (GF/AMD specifc)

CIM none

Process WET

Hardware Configuration (fab):

Main System 2x Stripper Modul (CPC+SRD) 1

Handler System Robot (Genmark/Semitool) 2

Factory Interface FOUP 2

Options System Fire extinguishing system Co2 old type 1

Missing/ Faulty Parts/ Accessories List:

Rinse SRD chamber out of function/usage + Carrier 3