2007 Semitool SP012F1 SSC SII
2007 Semitool SP012F1 SSC SII
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Description
Tool Status Connected
Wafer Size 300 mm
Fab Section Clean
Asset Description Resist Strip Tool
Software Version 2.5.0.12 (GF/AMD specifc)
CIM none
Process WET
Hardware Configuration (fab):
Main System 2x Stripper Modul (CPC+SRD) 1
Handler System Robot(Genmark/Semitool) 2
Factory Interface FOUP 2
Options System Fire extinguishing system Co2 old type 1
Missing/ Faulty Parts/ Accessories List:
Rinse SRD chamber out of function/usage + Carrier 3
Specifications
Manufacturer | Semitool |
Model | SP012F1 SSC SII |
Year | 2007 |
Condition | Used |
Stock Number | BM2441 |