1995 KE KE-DD 823V

Process: H2 ANNEAL

1- System Layout: Main , Utility

2- System Type: L Type

3- Side Maintenance: No Side Maintenance

4- System Paint Color: IVORY

5- Furnace Front Surface Finish: Painted

6- Heater Model-

7- Rapid Cooling Unit: Not Installed

8- N2 Load Lock: Not Installed

9- O2 Analyzer: Installed (LC-750)

10- Cassette I/O Type (Normal / SMIF): Normal I/O

11- SMIF Maker / Model: Not Installed

12- AGV Compatibility: Unable

13- System Main Controller: CX2003A

14- Mechanical Controller: CX1215-1,1215-2

15- Sequence Controller: CX1309A

16- Gas Controller: CX2003A

17- Gas Flow Chart Pannel: Installed

18- Operation Pannel: Installed

19- Signal Tower / Colors: Not Installed

20- Furnace Temperature Controller: CQ1500A

21- Furnace Overtemp Detector: DN-130LZ3

22- Gas Detecter Maker / Model: Riken Keiki / GD-D8V

23- Detecting Gas: H2

24- Host Communications: Yes

25- User Host Computer I/F: HSMS

26- Manual (Drawing, Parts list etc): Not Include

GAS SYSTEM:

1- Process Gas: N2 , H2

2- Style: Integrated Gas System (FUJIKIN)

3- Manual Valve:FUJIKIN

4- Air-Operated Valve: FUJIKIN

5- Filter: MILLIPORE ( Ni )

6- Regulator: YATAKA ENG

7- MFC Maker / Model: STEC / SEC-7330,7350,7340

8- PT Sensor Maker / Model: TEMTECH / TPTMV-WD420

9- DPM Maker / Model: TEMTECH / NPS4200OP

10- Check Valve: NUPRO

11- Baking System: Not Installed

12- Liquid Source Auto-Refill: Not Installed

13- Burn Controller: Not Installed

14- Veporizer: Not Installed

VACUUM/ EXHAUST SYSTEM:

1- Pump: Not Installed

2- Pressure Control Valve: Not Installed

3- Pressure Controller: Not Installed

4- Pressure Sensor: Not Installed

5- Trap: Not Installed

6- Gas Cooler: Not Installed

WAFER/ CASSETTE HANDLING:

1- Wafer Type: 200 mm

2- Auto Wafer Aligner: Installed

3- Wafer Qty. in Cassette: 25

4- Cassette Storage Qty: 21

5- Fork Type: 1 + 4 (VAC)

6- Fork-Wafer Presence Sensor: Installed

7- Fork-Variable Pitch: Installed

8- Magnetic Seal Rotation: Not Installed

PROCESS KITS:

1- Boat Type / Pitch: N/A

2- Boat Material: N/A

3- Cap Pedestal Material: N/A

4- Outer Tube: N/A

5- Inner Tube: N/A

6- SIC Liner Tube: N/A

7- Process Tube: N/A

8- External Torch: N/A

9- Profile T/C Type: N/A

10- ETC