TEL Tokyo Electron 3M87-055471-11 Trias Module Controller-S 3M80-002347-11 Spare

• Part No: 3M87-055471-11
• Model No: TRIAS MODULE CONTROLLER
• Removed from a TEL Tokyo Electron Trias CVD Chemical Vapor Deposition System

Installed Components

• 3M80-002347-11
• 3M80-002350-11
• 3M87-055526-13

This TEL Tokyo Electron 3M87-055471-11 Trias Module Controller is used working surplus. The unit has a minor dent to the upper cover (see photo). The physical condition is good, but there are signs of previous use and handling.