1995 Dainippon Screen SK-80BW-AVPE CD

AS-IS Refurbish

Wafer Size: 200mm

PROCESS: PHOTO

WAFER FLOW DIRECTION RIGHT TO LEFT

LOADING CONFIG 4 CASSETTE LOADING PORT

CASSETTE INDEX STATION 4 SIDE LOADING

LAYOUT 2 coater 2 developer

MAIN CONTROLLER NEC 9801

WAFER TRANSFER ROBOT 1 block system

PR RESIST PUMP waki bellows pump 4 set per 1 spin unit R

SUB UNIT Power unit

CCD

ETU

TCU