AMAT Centura II DPS Plus POLY

* 6 inch setting

* Current Working As-is

* Condition Excellent

* After refurbishment, take out

A. General Information Manufacturer Applied Material inc.

Model DPS PLUS POLY

Technology Poly Etch

Platform Type ETCH CENTURA II

Application Poly Etch

Software unknown

Wafer Size 150mm(JMF)

B. Mainframe Configuration Position A DPS PLUS POLY ( purasu 

Position B DPS PLUS POLY 

Position C -

Position D -

Position E -

Position F Orienter

Front Panel Anti-Static Painted

Signal Light Tower 3 Color(R,A,G)

C. Electrical Requirements Line Voltage 200/208 VAC

Line Frequency 60 Hz

GFI 100mA

AC Rack Types Centura II 66inch Common

D. System Safety Equipment EMO Switch Type Press To Activate, Turn To Release EMO

EMO Guard Ring Included

E. Mainframe Chamber Wall Flow Sensor Yes

Chamber Cathode Flow Sensor Yes

Chamber Turbo Pump Flow Sensor Yes

DPS Ch Dome Flow Sensor Yes

Loadlock Type Wide Body

Cassette Type Supported unknown

Loadlock Slit Valve O-ring type(Viton)

Wafer Mapping Enhanced(fast)

Robot Type HP+

Robot Blade Option unknown

Wafer On Blade Detector Basic

Loadlock Vent Filter Ceramic

Loadlock Heater Install

Loadlock Vent Top Vent

F. Orienter Chamber Hoop Type unknown

G. Etch Chamber(DPS_R1) DTCU ES DTCU

Voltage Distributor Electrode YES

Mount Ring unknown

Lower chamber cover STD

Lifter pin ass'y Lip seal type(0010-39650)

TMP EDWARDS

Pressure Gauge CM100mt(MKS)

Pressure Gauge CM10torr(MKS)

ESC HV MODULE 0010-30139

BIAS RF Matcher 0010-00854

Source RF Matcher Install

HE Pressure Controller MKS649A Type(50sccm)

Source RF Generator Atlas2012

BIAS RF Generator ACG-6B

Throttle Valve Throttling Gate Valve(TGV)

Electrostatic chuck type  unknown

ETCH Pump Pipe Line(With heater) for Edwards TMP

Cathode Ass'y Single HE supply type

Upper Chamber Full A-Coat

Ceramic dome 0200-39137

Single Ring unknown

H. GAS Pannel MFC Type AERA FC-D980C

ETCH_GAS1,11 CL2_200sccm

ETCH_GAS2,12 HBR_200sccm

ETCH_GAS3,13 -

ETCH_GAS5,15 -

ETCH_GAS6,16 CF4_200sccm

ETCH_GAS7,17 CHF3_100sccm

ETCH_GAS8,18 O2_100sccm

ETCH_GAS9,19 SF6_100sccm

ETCH_GAS10,20 AR_200sccm

Gas panel facilities hook up  BD Side SLD Box Bottom Feed

Gas panel exhaust     AC chamber TOP Side

Gas panel controller          VMEⅡ

Valve Veriflo

Transducer MKS 872

Regulator Veriflo SQ2

Filter Milipore

Transducer Displays 1 Display Per Stick

I. System Configuration Endpoint Monitor CRT

Endpoint Position Rack Mount

Endpoint Type Monochromator(2ea)

Controller Type V452 SBC

Umbilicles 40 Feet Base

Controller to Mainframe Umbilical 40ft

AC To Mainframe Umbilical 40ft

Chiller Control Cable Length 40ft

Chiller Hose Length 50ft

Pump Signal Cable Length 50ft

RF RACK to MF Cable Length 75ft

Chiller type SMC H2000

CATHODE(CH-A & B) H2000(SMC)

WALL(CH-A & B) H2000(SMC)

DOME(CH-A & B) Facility Cooling Water

Coolant Type DI+EG

Chiller power line 2ea(Tool C/B <--> Chiller)

chiller hose Hose type_4ea(50Ft)

chiller signal line Signal I/O

Pump Configurations EBARA AA40W/AA10

Pump Interface Qty 4ea

Pump power line 4ea(Tool C/B <--> Pump)

M/F Utility connection Rear side 

J. ETC UPS NONE

LAMP CB 20A

RF GENERATOR CB (B)15A/(S)30A

PUMP CB 30A

System Monitor 1ea CRT(Stand Alone)

Dtcu Hoist single type