1997 Ebara EPO-223 CMP tool

Condition: complete, as is

Wafer size: 8"

System Information

WEIGHT 4800 Kg

OUT LINE W: 1800mm(CL-1640) * D: 3135mm * H: 2430mm(Base Plate포함)

UNIT

ITEM:

2.1 Load/Unload : Amount 1ea

Type Cassette Type

Cassette Stage 2ea

Dummy Wafer Stage 2ea

2.2 Wf Trans Unit : Type Wet Robot - 1ea ( X - Type )

Dry Robot - 1ea

Turn over 1(Dry/Wet) - 1ea

2.3 Polishing Unit : Amount 8ea

Type Top Ring Unit - 2ea (L,R)

Turntable Unit -2ea(L,R)

Dressing Unit -2ea(L,R)(Soft Brush Type)

Pusher Unit - 2ea(L,R)

Topring Unit - Normal Head

Turntable Unit - SUS Type

Dressing Unit - Soft Brush Type

Pusher Unit - Wf Cleaning Type

2.4 Slurry Supply Type None

2.5 Cleaning Unit Amount 3ea

1st Clean Unit - 1ea (L)

2nd Clean Unit - 1ea (L)

3rd Clean Unit - 1ea (L)

1st Clean Unit - Roll Type

Wf Rotation - Roller Type

Exhaust - Manual Damper

2nd Clean Unit - Roll Type

Wf Rotation - Roller Type

Exhaust - Manual Damper

3nd Clean Unit Spin Dry Type

Wf Rotation - Chuck Type

Exhaust - Manual Damper

2.6 Power Supply Type Pactory Supply Type

Power Supply Control Panel - None

Each Module Independence Break

2.7 Control System VME Bus, Board Computer

2.8 Option None

2.9 Additional Machin Chiller - 1ea

Slurry Supply System(Unit) - 2ea

ITEM MODEL Vintage Maker

Chiller SCS3WHE 1996.03.08 Ebara

Slurry Supply System(Unit) EPOS-010 2000. 9 Ebara

Slurry Supply System(Unit) EPOS-010 1996. 6 Ebara