2008 KLA-Tencor EDR 5200 SEM

Tool Status Disconnected

Wafer Size 300 mm

Fab Section Metrology

Model EDR 5200

Vintage 2008

Asset Description NA

Software Version Window

CIM Linked

Process Defect Review

Hardware Configuration (fab):

Main System Main Tool 1

Handler System Wafer Transfer Robot 1

Handler System Loadport 2