2010 KLA-Tencor EDR 5210

Tool Status Disconnected

Wafer Size 300 mm

Fab Section Metrology

Model EDR 5210

Vintage 2010

Asset Description NA

Software Version Windows

CIM Linked

Process Defect Review

Hardware Configuration (fab):

Main System Main Tool 1

Handler System Wafer Transfer Robot 1

Handler System Loadport 2