Suss PM5 manual prober with Mitutoyo FS60 microscope and (2) PH500 micropositioners, 150mm vacuum chuck

6" vacuum chuck

Pair PH500 micropositioners with vacuum base

Optional Kinetic Vibration isolation table add $1600.

Optional Infinity 2-3 3.3mp  color camera with monitor, PC, and software Add $2300.

Mitutoyo FS60 stereozoom with  APO10x/20x/50x objectives

MOTIC fiber optic illuminator

Vacuum manifold

Description:

The SUSS PM5 is a probing station for electrical (DC and HF) measurements on wafers, chips and substrates up to 150 mm.

It has two SUSS ProbeHeads placed on the stable platen, with space for additional probes if necessary.

The platen height can be adjusted up to 40 mm allowing a quick and easy setup of the system.

The additional contact separation of 200 μm ensures accurate fine adjustment of the probe platen.

The 2 ProbeHeads (X, Y, Z movements) are connected to the platen by vacuum.

A metal bridge, which spans the width of the probe system and is fastened to the base, supports the microscope. 

The scope is equipped with ExtraLongWorkingDistance 10x, 20x, 50x objectives and 10x ocular.

The stage locks into place and provides additional fine adjustment in the Z direction.

A pull-out stage permits quick and ergonomic loading and unloading of your DUT.