WAFER SIZE: 200mm

LEICA Microscope INM20

2004 NANOMETRICS CALIPER_MOSAIC Overlay Measurment WAFER SIZE: 12

1996 HITACHI S-5000 Broken-SEM

1995 KLA-TENCOR Opti-2600 Thickness Measurement WAFER SIZE: 8

2004 ADE-KLA-TENCOR FIT 3120 Particle Counter WAFER SIZE: 12

2007 KLA-TENCOR VISEDGE_CV300 Wafer-Edge Inspection WAFER SIZE: 12

1997 KLA-TENCOR AIT-1 Defect Inspection WAFER SIZE: 8

1996 RUDOLPH FE-VII Film Thickness WAFER SIZE: 8

2000 RUDOLPH MetaPulse-200 Metal Thickness WAFER SIZE: 8

2011 RUDOLPH MetaPulse-III 300XCu Metal Thickness WAFER SIZE: 12

2000 Hitachi S-4700 SEM Operational WAFER SIZE: 8