Veeco WaferEtch 3300

2 chambers

Tank 1 – Acid tank – 3 arms – 1 arm – BOE 7:1, 1 arm 10:1:1 DI-Sulph-Perox, 1 arm 4:1 – Phos-HCl 

Mix tanks internally in tool for 10-1-1 and 4-1, BOE not mixed, all bottle fed inside tool, no CDU.

All lines cooled with single TC block with ext. chiller

Tank 2 – rinse tank – DI/N2, standard fare

Dual cassette load system, set for 3” currently. Can be set up for 8 inch with Paddle change

4 paddle robotic system