Sencera In-line Sputter 6 target large panel DC power supply vacuum & Turbo pump

Sencera In-line Sputter 6 target large panel DC power supply vacuum & Turbo pump

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Description

Used

Sencera In-line Sputter, 6 target. large panel, working, complete, RF and DC power supply, vacuum pump and turbo pump with controller. Many parts or components.

Sputter Tool details

Currently runs the following metal deposition: Al, Moly, ITO, Cd

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MKS optima DC power supply Model: DCG-200Z  PN: RPDG200Z-08055 REV: 001 qty 1

Advanced Energy MDX Magnetron Drive 2011-000-AA qty 1

Adixen AD30KL Dry Pump qty 1 

BOC Edwards STP-iXA2206C Turbomolecular turbo pumps with YT81-0Z-010 controller qty 1

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VAT Vacuum Pendulum Control Valve 65048-PAAP-BAS2/0001 A-1799517

VAT Vacuum Pendulum Control Valve 65048-PAAP-BAS1/0002 A-973785

VAT Vacuum Pendulum Control Valve 12148-PA24-AKW1/0005 A-977764

VAT Vacuum Pendulum Control Valve 12148-PA24-AKW1/0006 A-977764

Allen Bradley 1734 Processors and I/O

Brooks Delta Series MFC qty 8


Specifications

ManufacturerSencera
ModelIn-line Sputter 6 target large panel DC power supply vacuum & Turbo pump
ConditionUsed
Stock NumberGOD23082019720221813