Von Ardenne Sputter, 2 Cluster Tool - Model CF 850S, Turbo pump, Brooks Robot

Used, looks complete

8 inch wafer

Von Ardenne cluster tool details

Huttinger PFG 3000 DC 0946868 V 01/04 RF Generators qty 2

Huttinger PFG 2500 RF 457668 V 02/01 RF Generators qty 1

Huttinger PFG 1000 RF 0457656 V 06/04 B RF Generators qty 1

Huttinger PFG 1000 RF 1268387 V 01/03 RF Generators qty 1

Huttinger PFG 600 RF 457638 V 01/01 RF Generators qty 1

Huttinger PFM 1500A 952756 V02-00/98 match network qty 1

Huttinger PFM 1500A 952756 V01/04 match network qty 1

Huttinger PFM 3000A 991239 V02-00/98 match network qty 1

Huttinger PFM 3000A 989213 V02-00/98 match network qty 2

Advanced Energy MDX 500 MN3152384-001B DC Sputter Power Supply qty 1

Advanced Energy MDX 1.5k qty 2

DESA motor controllers qty 4

Dresden Electronics Industrial computer qty 2

Pfiefer TMH 1601 Turbo pump qty2

Pfeiffer TMH 1001 Turbo pump qty 1

Pfeiffer TMH 531 Turbo pump qty 1

PRI VAC409 Robot with ESC 200V Controller

Brooks 6-002-0014-SP robot with ESC 200V Controller

Harmonic drive RHS 17 qty 1

Harmonic drive RH140 qty 2

VAT gate valves qty 4