1995 Nitto Denko HR-8500II

NEL System

Process Automatic Detaper, Tape Remover

Vintage 1995

Wafer Size 8 inch

Voltage 100 / 200 VAC, 15 A

Equipment component Main body

Main power

Robot type:CybeQ 6100

Loadlock

Back grinding

Aligner unit

Wafer table removing station