2017 Nitto Denko DR-8500III

NEL system

Process Automatic Taper

Vintage 2017

Wafer Size 8 inch

Voltage 100 / 200 VAC, 15 A

Equipment component Main body

Main power

Can supply 8” / 6” / 5” / 4”

Heat plate

Loadlock

Touch panel

Robot RB-747