1995 AMAT Endura 5500

150mm

Refurbished in 2010

Loadlock type: narrow body

Mainframe:

Transfer robot type: HP (conversions available to VHP)

Buffer robot type: HP

Transfer chamber:

Position 1: ITO

Position 2: Ti

Position 3: ITO

Position 4: Ti

Position A: Pass-Through

Position B: Pass-Through

Position C: Preclean

Position D:

Position E:

Position F: Orienter (No Degas)