1995 AMAT Endura 5500
1995 AMAT Endura 5500
Contact us for price
orCall +353 (0) 87 192 1110
Description
150mm
Refurbished in 2010
Loadlock type: narrow body
Mainframe:
Transfer robot type: HP (conversions available to VHP)
Buffer robot type: HP
Transfer chamber:
Position 1: ITO
Position 2: Ti
Position 3: ITO
Position 4: Ti
Position A: Pass-Through
Position B: Pass-Through
Position C: Preclean
Position D:
Position E:
Position F: Orienter (No Degas)
Specifications
Manufacturer | AMAT |
Model | Endura 5500 |
Year | 1995 |
Condition | Used |
Stock Number | BM2622 |