2006 STS / SPTS CPX Pegasus

Refurbished Condition 2024

200mm wafer size

2 Chamber

Volts/Hz/Ph: 380Volts/60Hz, 160 Amps/phaseEstimated crate dimensions (h x w x l) and gross weight.

There are roughly these boxes :

1.170*160*230 (cm)

2.150*122*220

3.110*90*225

4.100*70*195

5.200*200*120

6.150*150*100

gross weight : about 4000 kg