LAM, 2300 v2, 300mm Lam 2300 v2 Etch platform with 4 Lam Exelan Chambers. Each chamber has an En...

- 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roug...

Make: Tokyo Electron Ltd.

Single chamber silicon nitride etcher. Status: In Storage 8" Single chamber silicon nitride etcher Wafer S...

Make: Tokyo Electron Ltd. Quantity: (2) Vintage: 2007 (1) 2006 (1)

2x Exelan, (EFEM, Mag7, Loader, RF cart missing) Process: oxide Wafer Size: 12 inch

AMAT Centura PC-II CH. Wafer size: 200mm Process: PVD

Make: Tokyo Electron Ltd.

Wafer Size: 12 inch