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1996 TEGAL 903e ETCH SIO2
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1998 TEGAL 901e ETCH SIN SIC
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1999 TEGAL THEIS 903 DRY ETCH BPSG
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Hitachi M-308ATE Metal Etch System w/ Power Rack, Delatech 858 V-2 scrubber, Gas Cabinet
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Parts tool Used
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Mattson Aspen III, Front End Transfer Chamber, Robot, Controller
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Used, parts, Transfer module 12" wafer
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2006 STS / SPTS CPX Pegasus
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Refurbished Condition 2024 200mm wafer size Volts/Hz/Ph: 380Volts/60Hz, 160 Amps/phaseEstimated...
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March PX250 PLASMA ASHER with ENI ACG-5 Rf 500W power supply
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Ramco RAM8500
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TEL Unity2E-85IEM
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TEL Unity2e-85DPA
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TEL Unity2e-85TPATC
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TEL Unity2e-855PP DP
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