2002 LAM 2300 v2

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Used 2002 LAM 2300 v2
LAM, 2300 v2, 300mm Lam 2300 v2 Etch platform with 4 Lam Exelan Chambers. Each chamber has an En...

1993 Gasonics L 3200 Asher, 4", 6"

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Used 1993 Gasonics  L 3200 Asher, 4", 6"
- 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roug...

Dielectric Etch Telius SP 305 DRM

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Used Dielectric Etch Telius SP 305 DRM
Make: Tokyo Electron Ltd.

Tegal TEGAL 981

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Used Tegal TEGAL 981
Single chamber silicon nitride etcher. Status: In Storage 8" Single chamber silicon nitride etcher Wafer S...

Vertical Anneal Furnace

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Used Vertical Anneal Furnace
Make: Tokyo Electron Ltd. Quantity: (2) Vintage: 2007 (1) 2006 (1)

LAM 2300 Exelan 12inch

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Used LAM 2300 Exelan 12inch
2x Exelan, (EFEM, Mag7, Loader, RF cart missing) Process: oxide Wafer Size: 12 inch

AMAT Centura PC-II CH. 200mm

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Used AMAT Centura PC-II CH. 200mm
AMAT Centura PC-II CH. Wafer size: 200mm Process: PVD

Dielectric Etch Telius SP-305 SCCM

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Used Dielectric Etch Telius SP-305 SCCM
Make: Tokyo Electron Ltd.

Oxford Instruments Plasmalab 80+

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Used Oxford Instruments Plasmalab 80+

March PX-1000 Plasma Cleaner

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Used March PX-1000 Plasma Cleaner

TEL Certas Etch 12 inch Dry Clean

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Used TEL Certas Etch 12 inch Dry Clean
Wafer Size: 12 inch