2006 STS / SPTS CPX PEGASUS

WAFER SIZE: 200mm

CONDITION: USED GOOD CONDITION

CHAMBER QUANTITY: 2 CHAMBERS

VOLTS/ Hz/ PH: 380 VOLTS/ 60 Hz/ 160 AMPS/ PHASE

There are roughly these boxes :

1.170*160*230 (cm)

2.150*122*220

3.110*90*225

4.100*70*195

5.200*200*120

6.150*150*100

gross weight : about 4000 kg