Ulvac Enviro Downstream Microwave Asher

Ulvac Enviro Downstream Microwave Asher

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Description

- Single Chamber Advanced Strip System

- Computer

- ENI OEM-6B RF Generator

- 5 MFCs

- Brooks Robot

- Edwards IQ Pump/Blower

- Manuals

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Specifications

ManufacturerUlvac
ModelEnviro Downstream Microwave Asher
ConditionUsed
Stock NumberGOD23082019720222043