2010 Advanced Energy APEX 3013 1513

AMAT - Advanced Energy Generators, Apex 3013, 1513, Paramount 1513

Apex 3013 qty 7 

Apex 1513 qty 7 

Paramount 3013 qty 2 

Paramount 1513 qty 2

2010 Vintage 

Tool ID Multiple RF Generators (source and bias) from AMAT Centura platform w/ Minos and Carina chambers

Tool Status Disconnected

Wafer Size NA

Fab Section Etch 

Asset Description Multiple RF Generators from AMAT Centura tool supporting Minos and Carina chambers

Software Version na

CIM na

Process Etch

Hardware configuration (fab):

Main System Generators Paramount 1513 2

Main System Generators Apex 1513 7

Main System Generators Apex 3013 7

Main System Generators Paramount 3013 2