2017 Insidix TDM Compact 3

Tool Status Connected

Wafer Size NA

Fab Section R&D

Asset Description Insidix TDM Compact 3

Software Version Windows 7 Pro SP1

CIM NONE

Process Metrology - Topography and Deformation Measurement

Main System TDM Compact 3 tool with Thermal Solutions AC-95 chiller 1

Handler System manual Loading by operator 0