2009 Disco DFL-7160

*That particular tool is set up with a UV laser for Glass and GaN (visible light)

Process Laser saw

Vintage 2009

Wafer Size 8 inch ( Max Workpiece Size 12 inch)

Voltage 200~240 VAC ± 10%, 3 Phase

Equipment component Main body

Main power

Loadlock

Laser type:F type

No Chiller