1997 KLA AIT I Main System

Currently Configured for 6"/150mm & 8"/200mm Wafers

Double Darkfield Inspection Tool

SECS II/GEM Communication Interface

Low Contact Chuck (AIT I)

Multi Channel Collection Optics System with Independent Programmable Spatial Filters

Pentium CPU with Windows NT Installed

Wafer Transfer Area Housing Cover

Wafer Handling Module

High Voltage Electronics

Front and Rear EMO’s with Covers

Flat Panel Display for AIT

Fold Down Keyboard Tray with Built In Mouse

X/Y Drive/Controller Chassis and Motion Controller Card

Blower Box (exhaust hoses not included)

Operations Manual and Documentation