Hitachi S-5500

Process Type: FA SEMs/TEMs/Dual Beams

Specifications:

Secondary Electron image resolution:

0.4nm at 30kV and 1.6nm at 1kV

Specimen Stage Stage Traverse: X: +3.5mm, Y: +2.0mm, Z:+0.3mm, T: +40 degrees

Sample size:

• Bulk - 5.0mm x 9.5mm x 3.5mmH (max)

• Cross-Section: 2.0mm x 6.0mm x 5.0mmH (max)

Configuration:

Operating System: Windows XP Pro

Optional Specimen Holders: Cross Section holder Quartz PCI

Water Recirculator: SMC