Hitachi S-4700-II
Hitachi S-4700-II
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Description
Process Type: FA SEMs/TEMs/Dual Beams
Wafer Size: N/A
Status of Equipment: Refurbished
Configuration
Type II stage with 5 axis motorization
Type I load lock, 4 inch (optional 6 inch)
Full control pad
CD Measurement
Turbo Pump
Upgrade to Windows XP Pro
Specifications
| Manufacturer | Hitachi |
| Model | S-4700-II |
| Condition | Refurbished |
| Stock Number | BM2711 |