2008 Rigaku MFM65 Small Spot Dispersive X-ray Fluorescence

Process Type: Metrology & Inspection

Wafer Size: 300mm

Date of Manufacture: 2008

Status of Equipment: Warehouse

Tool model:

Rigaku MFM 65 small spot Energy Dispersive X-ray Fluorescence

Load Ports: 2

Spot size: Dependent upon angle of spot placement

Excitation (X-ray) channels: a. Copper b. Gold c. Molybdenum

Software level: 1. 4.61 (Upgradable to 4.66)