2005 AMAT P5000
2005 AMAT P5000
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Description
2 Chambers (1CVD 1ETCH)
6 Inches
Condition : Working
* The equipment is currently in use at the fab.
Process : 2 chambers
* CVD 1 Chamber (TEOS SiO2 Depo.)
* Etch 1chamber (Oxide Etch)
Gas Supply : CHF3, CF4, C2F6, TEOS, Ar, He, O2, N2, Air
Specifications
| Manufacturer | AMAT |
| Model | P5000 |
| Year | 2005 |
| Condition | Used |
| Stock Number | BM2770 |