1996 Nikon NSR-2205i11D

PC type: Vax 4000/90 or 96 90A

HDD DKA200, DKA300

SET temperature: Chamber 23

LLTC 23

IATC 23.26

Chamber type: SENDAI S09

Reticle size: 6 inch

Reticle microscope: Fixed or Moveable Fixed

RA field 22*22

PPD <Yes or Not> No

Reticle Barcode Reader <Yes or Not> No

Library unit: 13 slot

Wafer chuck: Type Ring

Pre2 set have or not Have

Wafer loader: Loader Type Type 2

Wafer size 6 Inch

Notch or Flat Flat

In-Line <Yes or Not> No

Wafer Carrier Table Left/Right/Extra Left, Right

Alignment sensor: LSA <Yes or Not> Yes

FIA <Yes or Not> Yes

LIA <Yes or Not> No

Interferometer Laser Type 5517B

Rack Type Left or Right Right

Lamp Power 1750W or 2000W 2000W

SHRINC None or 1/2/3 None

Signal Tower <Yes or Not> Not

Projection Lens: Serial Number -

LLTC leakage <Yes or Not> No