2001 Gasonics/ Novellus PEP 4800DL IRIDIA
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Description
- Dual Chamber Etcher
- 150mm
- Vintage 2001
- Handler Module: Graphical User Interface
- (2) Cassette Platforms
- (2) Cooling Stations
- (2) Process Control Modules
- Yasakawa Robot
- GUI touchscreen is not working but can control system with monitor and mouse.
- Working until idled a few months ago. Some parts have been removed, but replacement parts are on hand.
- A list of missing parts, along with photos of the tool can be provided upon request
Specifications
| Manufacturer | Gasonics/ Novellus |
| Model | PEP 4800DL IRIDIA |
| Year | 2001 |
| Condition | Used |
| Stock Number | BM2795 |