AMAT Centura 5200 HDP

150mm

Fully operational when powered down

Narrow body loadlock

RPC (remote plasma clean)

(3) ENI generators

Refurbished in 2018 or 2019 (they do not know the original MNFR date)

Gas Lines            

L1           N2 Purge

L1           Empty

L1           Empty

1             Empty

2             O2 - 400 SCCM

3             SIH4 - 200 SCCM

4             Empty

5             AR - 300 SCCM

6             SIH4 - 20 SCCM

7             AR - 50 SCCM

8             NF3 - 2.0 SLM

9             AR - 2.0 SLM

10          Empty

R3          Empty

R2          Empty

R1          N2 Purge