2005 STS ICP PRO HRM Etcher
2005 STS ICP PRO HRM Etcher
Contact us for price
or
Call +353 (0) 87 192 1110
Description
150mm
Bosch process
STS Loadlock Chamber
Loader with Robot for cassette to cassette operation (2 load stations)
ESC Wafer Clamping with Backside Cooling
Ebara Turbo Pump
(2) Chillers
The gases are: Argon MFC; Oxygen MFC; SF6 MFC; C4F8 MFC
Specifications
| Manufacturer | STS |
| Model | ICP PRO HRM Etcher |
| Year | 2005 |
| Condition | Used |
| Stock Number | BM2798 |