2005 STS ICP PRO HRM Etcher

150mm

Bosch process

STS Loadlock Chamber

Loader with Robot for cassette to cassette operation (2 load stations)

ESC Wafer Clamping with Backside Cooling

Ebara Turbo Pump

(2) Chillers

The gases are: Argon MFC; Oxygen MFC; SF6 MFC; C4F8 MFC