2011 LAM Speed Chamber

300mm SPEED SiN

Fab Section Thin Film

Asset Description Single SiN SPEED chamber on WTS platform, SPEED

Software Version 5.73 B 86

CIM SECS/GEM

Process SiN

Main System SPEED SiN chamber-single chamber on WTS platform 1

Handler System WTS 1

Factory Interface FOUP 2

MPD-electrical box 1