Ohmiker 80B

The Ohmiker-80B System is specifically designed for high throughput

and long-term reliability performance in semiconductor

backside/frontside metalization coating process up to six inches wafer.

SPECIFICATIONS

Vacuum Chamber

Vacuum Pump

Evacuation Line

Vacuum Gauge

Electron Beam

Evaporator

■ SUS304 Ф880 x H880(mm).

■ Ф5" view ports with reflection mode window.

■ Welded on semi-rectangular pipes for cooling, all made of stainless steel.

■ Manual chamber door opening/closing with automatic pneumatic

lock/unlock.

■ Coating protection shields set.

■ Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s).

■ Water-cooled baffle & 熱氮加熱氣 heater for cryo pump.

■ HanBell PS-602, oil free dry pump station (10,000 liters/min),

with 1 roots pump and 1 oil-free dry pump.

■ Ф16" pneumatic actuator High Vacuum Gate Valve.

■ NW 63 pneumatic actuator roughing valve.

■ NW 25 Soft-pumping line.

■ Anti turbulence soft-venting line.

■ Inficon BCG-450, Digital full range vacuum gauge. (Ion & Pirani gauges)

■ Inficon PCG-550, Digital Pirani gauge.

■ Plasma Tech, Electron Beam Evaporator, 10 KW output power

supply and E-Beam source.

■ Feedthroughs for crucible drive, water cooling, and High-voltage.

■ Source with 270 degree deflection.

■ X and Y sweeper.

■ 4 pocketes x 40 cc with rotating crucible Indexer.

■ Pneumatic shutter drive 90o

.

■ BN liner for AL deposition.

Multi-Layer Thickness, Rate and Process:

■ Inficon XTC-3S, Six sensor heads with 6MHz oscillators,

positioned centrally in the chamber for layer termination.

■ With cooling water lines and signal cables.

Control Unit Substrate Carriers:

■ Process control with RS-232 and remote handset.

■ Substrate carrier rotary drive (5-20 RPM speed range).

■ Planetary domes, pre-machined to accept customer specific substrate

holder x 2 sets. ( 60 pcs of 4" wafer per run ) (backside fitting)

■ Planetary domes.

Substrate Heating(Max. 250oC):

■ Quartz heater arrays (backside reflector / deposition shield).

■ Sheathed thermocouple with temperature PID control system.

System Frame:

■ Clean room compatible.

■ System frame with clad panels, mounting frames with height

adjustable transport rollers.

■ Mains and safety elements with emergency shut-down, mains

distribution and generation of auxiliary control voltages.

Accessories

■ One set of coating protection shields.

■ One set of sight and lamp protection glasses.

■ One set of electron beam evaporators' shutter plate.

System Control (UPS designed in):

■ PC-Based Industrial Computer interface for automatic operation

with full manual operation. (512MB RAM, 80GB HD at least)

■ Graphic multi-tasking real time control/display software operating

for all sensors and drives under Microsoft WINDOWS XP.

■ Automatic process sequences delivered: 1) Autopump, 2) Autovent,

3) Auto-heating, 4)Multi-steps coating procesures.

■ Multiple operation modes: 1) Manual, 2) Automatic, 3) Maitenance

and 4) Automatic process sequence generation and editing.

■ History data recorded with vacuum, temperature, rising/soaking

rate/time, emitter current, rotation speed, deposition rate, power

rate...etc.

■ Authorities enactment.

■ Alarm history and process parameters history backup abilities.

■ Power-Off backup UPS system designed in. If electricity power lost,

Alarm and some process data recorded for further processing.

DIMENSIONS:

■ 1300mm (W) x 1700mm (D) x 1980mm (H)

Safety Features:

1. When the following abnormal conditions occur, the system will shut down completely and

a warning alarm will sound.

(a) Low or no cooling water supply

(b) Abnormal chamber pressure

(c) Compressed air supply pressure is low

(d) Abnormal pump operation

(e) Input of external signal

2 . A large red emergency stop switch with a guide ring is located to the side of the touch panel.

3 . All valves are interlocked to prevent mistakes in operation

4 . All pumps are interlocked to prevent mistakes in operation

5 . Interlock prevents errors in opening and closing the reaction chamber

FACILITY REQUIREMENTS

(The following utility requirements are listed as a reference only, the final utility requirements

will be confirmed before the system shipment.)

Power Supply ■ AC 380 V, 3P, 60Hz, 80A.

Ground Dry Air ■ Electrical resistance < 3Ω, Copper board > 5mm ×

50mm

Process Gas Supply ■ 5 kg/cm2

supply pressure.

■ Ф9.5mm quick fitting × 1.

■ 1 kg/cm2

supply pressure.

■ 1/4" SWL fitting × 1.

Evacuation Purity > 4N5.

Cooling Water ■ NW 40×1 fitting, for dry pump exhaust

■ About 2 kg/cm2

supply pressure, 25 liters/min @20oC. ■

1" hose connectes fittings x 2.

Items Included

■ Differential pressure > 1.5 kg/cm2

Operation

Standard Tools 2 copy (1 X Cleanroom, 1 X Normal)

1 set