Nikon Stepper NSR-2205i14E2

Best Focus 0.028 ±0.1

FIA Xave:0.009 ±0.2

Yave:-0.0003 ±0.2

３σX:0.037

３σY:0.028

LSA Xave:0.0154 ±0.2

Yave:-0.0005 ±0.2

３σX:0.035

３σY:0.03

Scaling X -0.142 ±0.5

Scaling Y -0.113 ±0.5

Orthogonality 0.137 ±0.5

STEP X 0.015 0.03

STEP Y 0.021 0.03

BACK X 0.027 0.035

BACK Y 0.021 0.035

ID8 1.41 1.5%

Lamp Power ID8 775mw 6200H

Cumulative exposure deviation amount　ID8 50mJ 50.1 ±2.0%

100ｍJ 100.1 ±2.0%

200ｍJ 200.1 ±2.0%

400ｍJ 400.2 ±2.0%

PSD Residual offset 0.128μrad 0.15

AngleX -4.493 7.2μrad

AngleY 3.738 7.2μrad

Max-Min 0.212 0.35μm

Pre-alignment　３σX 4.779 ±15

 ３σY 10.332 ±15

θ 6.016 ±15

AveＸ -4.42 ±10μm

AveY 2.834 ±10μm

θ -3.121 ±10μm

DIS　Xmax 0.042 ±0.06

 Xmin -0.046 ±0.06

    Ymax 0.016 ±0.06

    Ymin -0.04 ±0.06

Reticle Rotation 3σ 0.001 0±0.007

Reticle blind 500~620 400~800μm

207 Focus ±0.15μm 0% -> Ｈ－Ｉ Ｃ－Ｉ -> 0.068 -0.003

100%-> Ｈ－Ｉ Ｃ－Ｉ -> -0.105 -0.024

±0.015μm 70% -> Ｈ－Ｉ Ｃ－Ｉ -> 0.005 0.004

100% -> Ｈ－Ｉ Ｃ－Ｉ -> 0.005 0.007