1998 DNS SK-80BW-BVPE

No-missing parts

Vintage: 1998. 9

Configuration:

2-Body System

DUV type FFU’s

High Speed IFB unit

Coater

3-Coat (1-TARC/BARC, 2-Resist)

2-Nozzles TARC/BARC, 4-Nozzles Resist

1-LPAH (Low Pressure HMDS)

8-Soft Bake Hot Plates (250℃ type)

6-Chill Plates

Developer

3-Develop

2-SI Nozzles + Prewet

2-EEW (Optical Edge Exposure)

6-PEB Hot Plates (250℃ type)

2-Chill Plates