TEL ALPHA -8(AP)

1 Process ALLOY

2 Wafer Size 200mm

3 Process Wafer Qty 126

4 Process Type ALLOY

5 I/O Port / Smif I/O port

6 Load Lock NO

7 Carriet Slor 25 Slot

8 boat type Single

System Control Available None

1 System Controller PS4100Z

2 Operation Screen Touch Screen

3 Gas Flow Chart (Fornt & Rear) ◎ ◎

4 Temperature Controller M120

5 Vacuum Pressure Control N/A

6 Controller Transformer 1Φ 208V

7 Heater Transformer 3Φ 208V

8 Oxygen Analyzer N/A

9 HEC Pyro Ctl N/A

Process Gasses Available None

1 Process Gas 1 PN2

2 Process Gas 2 FO(4%H2/N2)

3 Process Gas 3 ---

4 Process Gas 4 ---

5 Process Gas 5 ---

6 Process Gas 6 ---

7 Process Gas 7 ---

Gas Distrubution System Available None

1 Basic Style Conventinal

2 Tubing Matrial SUS-316L

3 Tubing Finish VCR

4 Manual Valve N/A

5 Air-Operated Valve Fujikin

6 MFC Aera

Exhaust Distribution System Available None

1 Air-Operated Valve Type VCR Connect

2 Main Valve Fujikin

3 Cold Trap ◎

4 Pump Line ◎

Wafer/Cassette Handling Available None

1 Wafer Alignment ◎

2 Casstte Storage Qty 16

3 Casstte In/Out Port ◎

4 Casstte Handling Robot ◎

5 Wafer Transfer Type 1

6 Fork Matrial Ceramic

7 Fork Qty 1

8 Fork Variable Pitch ◎

9 Fork Wafer Presence Sensor ◎

Elevator Handling Available None

1 Boat Elevator ◎

2 Auto Shutter ◎

3 Boat Rotation ◎

4 Mechanical Parts ◎

Heating Chamber Available None

1 Heater Type VMM-35-001

2 T/C Type 5

3 Spike T/C 5