1996 TEL TE8500P
1996 TEL TE8500P
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Description
Process Etch-Oxide
Vintage 1996.10.04
Wafer Size 6 inch
Monitor Features Endpoint monitor
Voltage 208VAC, 50 / 60 Hz
Equipment component Main body
Load-lock
Front Panel Features
System Features
Facilities Connections
Pumps (Dry Pump)
Gas Panel
Process Chamber
Specifications
| Manufacturer | TEL |
| Model | TE8500P |
| Year | 1996 |
| Condition | Used |
| Stock Number | BM2893 |