AMAT Ultima
AMAT Ultima
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Description
HDP USG/FSG
Wafer Specification Selected Option
Wafer Size 200mm
Wafer Shape SNNF
Chamber Type / Location Selected Option
Position A ULTIMA STD
Position B ULTIMA STD
Position C EMPTY
Position D EMPTY
Position E (MC) MULTISLOT COOLDOWN
Position F (OA) ORIENTER
Position A Process USG/FSG
Position B Process USG/FSG
Position C Process NOT APPLICABLE
Position D Process NOT APPLICABLE
Electrical Requirements Selected Option
Line Frequency 60 Hz
System Safety Equipment Selected Option
EMO Switch Type TURN TO RELEASE EMO
Smoke Detector YES
A - (J6) ULTIMA STD HDP-CVD
Ultima Plus Chamber Options Selected Option
Wafer Temperature Monitoring (WTM) NO
Enhanced Uniformity YES
Turbo Pump EBARA 1600W
GATE VALVE HAV
Dual IHC Control HIGH BIAS 10/10 TORR
Nozzle LONG/LONG SIDE
TOP TOZZLE TOP BAFFLE AL2O3
CLEAN M/W
B - (J6) ULTIMA STD HDP-CVD
Ultima Plus Chamber Options Selected Option
Wafer Temperature Monitoring (WTM) NO
Enhanced Uniformity YES
Turbo Pump EBARA 1600W
GATE VALVE HAV
Dual IHC Control HIGH BIAS 10/10 TORR
Nozzle LONG/LONG SIDE
TOP TOZZLE TOP BAFFLE AL2O3
CLEAN M/W
C - EMPTY
D - EMPTY
E - (MC) MULTISLOT COOLDOWN
F - (OA) ORIENTER
Orienter / OTF Centerfinder Selected Option
Orienter Chamber Lid Hinge NO
On-The-Fly YES
Gas Delivery Options
Gas Panel Selected Option
Gas Panel Type HP 10 RA MAX
Gas Panel Doors SOLID
Cabinet Exhaust TOP EXHAUST
Single Line Drop YES
Single Line Drop Gas Line Feed BOTTOM FEED
SLD Valve Type ISOLATION
Valve FUJIKIN 5 RA MAX
Filter MILLIPORE Ni 10 Ra Max
MFC UNIT - 8161
Regulator VERIFLO
Transducer MKS
Gas Pallet -A Selected Option
Gas Pallet USG / FSG
Ultima Purge Options SPLIT PURGE
Top Gas Feed WITHOUT TOP O2
Line L1 N2 PURGE
Line L2 EMPTY
Line L3 EMPTY
Line 1 SIF4 - 100SCCM
Line 2 O2 - 400SCCM
Line 3 SIH4 - 200SCCM
Line 4 N2 -
Line 5 AR - 300SCCM
Line 6 SIH4 - 20SCCM
Line 7 AR - 50SCCM
Line 8 NF3 - 2.0SLM
Line 9 AR - 2.0SLM
Line 10 EMPTY
Line R3 EMPTY
Line R2 EMPTY
Line R1 N2 PURGE
Gas Pallet -B Selected Option
Gas Pallet USG / FSG
Ultima Purge Options SPLIT PURGE
Top Gas Feed WITHOUT TOP O2
Line L1 N2 PURGE
Line L2 EMPTY
Line L3 EMPTY
Line 1 SIF4 - 100SCCM
Line 2 O2 - 400SCCM
Line 3 SIH4 - 200SCCM
Line 4 N2 -
Line 5 AR - 300SCCM
Line 6 SIH4 - 20SCCM
Line 7 AR - 50SCCM
Line 8 NF3 - 2.0SLM
Line 9 AR - 2.0SLM
Line 10 EMPTY
Line R3 EMPTY
Line R2 EMPTY
Line R1 N2 PURGE
Gas Pallet Four -EMPTY Selected Option
Mainframe Options
General Mainframe Selected Option
System Placement THROUGH THE WALL
Facilities Connection VCR
Facilities Orientation MAINFRAME FACILITIES BOTTOM CONNECTION
Controller IO Interface Option I/O EXPANSION BASE CARD W/GAS AND EXPANSION CARD
Loadlock/Cassette Selected Option
Loadlock Type WIDE BODY LOADLOCK
Wafer Out of Cassette Sensor YES
Loadlock Slit Valve ORing Type KALREZ
Transfer Chamber Selected Option
Process Chamber Slit Valve A INTEGRATED DOOR AND CHEMRAZ O-RING
Process Chamber Slit Valve B INTEGRATED DOOR AND CHEMRAZ O-RING
Process Chamber Slit Valve C NOT APPLICABLE
Process Chamber Slit Valve D NOT APPLICABLE
Robot Type EXTENDED HP ROBOT
N2 Purge MFC Type UNIT C8160 500SCCM 4RA MAX
Phase II Facilities
Mainframe Inert Gas Line Options Selected Option
Chamber N2 Regulation REGULATED
Mainframe N2 Regulation REGULATED 30PSI
He Regulation REGULATED
Remote Options
System Controller Selected Option
DCVD Controller GFCI 30MA GFCI
Controller UPS YES
Cntrlr Electrical Interface CONTROLLER BOTTOM FEED AC CABLES
Controller Exhaust CONTROLLER TOP EXHAUST
Heat Exchanger/Chiller Selected Option
Swagelok HX Facilities Conn YES
Heat Exchanger SMC
System Monitors Selected Option
Monitor
Third Monitor
Umbilicals Selected Option
Controller Signal Cable Length
HX Hose Length
HX Cable Length
Third Monitor Cable Length
Pump Cable Length
Generator Rack Options Selected Option
Ch A RF Generator 1 ETO RACk
Ch B RF Generator 1 ETO RACk
Ch C RF Generator 1 NOT APPLICABLE
Ch D RF Generator 1 NOT APPLICABLE
Pump Options Selected Option
Pump Interface Type INTERFACE ONLY
Loadlock Chamber Pump NOT APPLICABLE
Transfer Chamber Pump NOT APPLICABLE
Process Chamber Pump Ch A NOT APPLICABLE
Process Chamber Pump Ch B NOT APPLICABLE
Process Chamber Pump Ch C NOT APPLICABLE
Process Chamber Pump Ch D NOT APPLICABLE
Specifications
| Manufacturer | AMAT |
| Model | Ultima |
| Condition | Used |
| Stock Number | BM2897 |