NOVELLUS Concept 2

Deinstalled from a tier 1 fab earlier this year (NxP I think) in working condition

200MM, PVD SYSTEM

(1) DEGAS CHAMBER

(1) DAMACLEAN ETCH MODULE

(1) TA PVD CHAMBER

(1) CU HCM PVD CHAMBER

(1) CVD TI SIN CHAMBER

(1) ORIENTER

Set up to do dual damascene copper interconnects

It has an etch module capable of dema etch, a barrier PVD module (Ta) a CVD glue layer module and then the copper PVD module