AMAT P5000 Etch Tool

Sitting idle currently under N2 purge.

2 CHAMBER

Deep Trench (MxP) / MxP+)

ChA: CHF3, Cl2, CF4, BCl3, O2, Ar, CH3F

ChB: CL2, BCl3, CF4, HBr, Ar, O2, SF6

Machine out of production since Jan 2023 – still connected

30 x N2 Purges

ESC (polyimide ESC)