AMAT P5000 Etch Tool
AMAT P5000 Etch Tool
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Description
Sitting idle currently under N2 purge.
2 CHAMBER
Deep Trench (MxP) / MxP+)
ChA: CHF3, Cl2, CF4, BCl3, O2, Ar, CH3F
ChB: CL2, BCl3, CF4, HBr, Ar, O2, SF6
Machine out of production since Jan 2023 – still connected
30 x N2 Purges
ESC (polyimide ESC)
Specifications
| Manufacturer | AMAT |
| Model | P5000 Etch Tool |
| Condition | Used |
| Stock Number | BM2952 |