2003 Nikon NSR SF200

As-is

Chamber Type: ASAHI

Reticle Size: 6"

Field Size: 26

RL library: L 10+10

Reticle Barcode Reader: -

Reticle Case Barcode Reader: -

Reticle PD/PPD: YES

Reticle SMIF: No

Wafer size: 150mm

Wafer Chuck type: Pin

Wafer Loader type: Type3

Pre Alignment2: OF

In-Line: Right

Wafer Carrier Table: Right

Alignment sensor: LSA/FIA/LIA

Rack Type:

SHRINC:

Mini computer: Alpha

Soft Ware Version: MCSV: Ver.E5.21F

Unit soft Version:

Additional Info.:

Laser Gigaphoton G21K2

Laser_Total shot 19420.349 Mpls