1995 Oxford Plasmalab SLR 720 RIE

Single chamber Plasmatherm SLR 720 RIE. It's got a load locked chamber, upgraded PC, turbo pump, etc

Etcher

8"/200mm wafers max, single load-locked chamber

200mm

- Model: SLR-720

- Single chamber with load lock

- Can process up to 8"/200mm wafers

- Turbo Pump 

- AEI/RFPP RF5S 500W RF Generator 

- Leybold Trivac D65BCS Vacuum Pump 

- Leybold Trivac D25BCS Vacuum Pump

- Neslab HX-75 Recirculating Chiller 

- Power Box

- Process Software 

- Computer upgraded in 2011 by OEM / runs Win 98

- Set of Operation and Maintenance Manuals 

- 4 MFCs:

   *SF6

   *N2

   *CHF3 

   *O2

REFURBISHED TO MEET OEM SPECIFICATIONS: 

- Chamber disassembled and receives full wet clean.

- All Chamber o-rings and seals are replaced with brand new.

- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)

- All MFCs rebuilt and calibrated professionally.

- All corrosive gas lines replaced with brand new.

- All Non-corrosive gas lines cleaned.

- Vacuum pumps professionally rebuilt. 

- Turbo pump professionally rebuilt.

- Chillers serviced and fully tested.

- All wiring/wire harnesses are checked, repaired or replaced if needed.

- All liquid and air lines, tubing and fittings checked and replaced.

- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.

- Checkout of all electronic and mechanical parts.

- Machine covers are cleaned, polished or replaced as needed.

- Equipment is fully tested to verify compliance to OEM and customer specifications.

- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.

- System cycle and repeatability testing completed prior to cover replacement and wipe down.

- Transport locks installed; all system components carefully packed, labeled, and professionally crated.

CONDITION:

Excellent condition guaranteed. 

This system will be delivered meeting factory specifications. 

Available for full inspection and demo.

As-Is / Where-Is Pricing is Also Available!