1997 DNS WS-820L

1. Equipment Information

Model: DNS WS-820L (2-Carrier, 50-Wafer Special type)

Manufacturing Year: August-1997

Process for: Etching

2. System Information

Chemical: HF/BHF

Transfer Flow: Left ⇒ Right

Separation Unit: HF/BHF Control Module

Measuring Instrument: Resistivity meter DKK AQ-10 @ Final Rinse

PLC (Master , Bath , POU Loader/Unloader): Mitsubishi A3A CPU P21 (4 sets)

Robot (3-Robot): Left/Right Stepping Motor (Oriental VEXTA UPH596TG10-A), Up/Down Stepping Motor (Oriental VEXTA PK596H-NACM-A4)

Circulation (HF/BHF)  Heating Exchange: KOMATSU E-332B-6 (2 sets)

         Chemical Filter: Housing type

Regulator: DR-631B (2 sets)

Pump: FF-20BT1-T3 (Iwaki Bellows)

Main PC: Intel(Hard Disc OK)

Carrier Detector Sensor (ROBOT-1, -2, -3): Front Carrier Detector Sensor

Signal Tower: 3-Color (G, Y, W, R) PATLITE Lamp Type

Power: 200V 3P, 10KVA + 100V 1P, 60KVA

Loader/Unloader: 3-Carrier Loading

Heating Temp Board (HF): Special Type Board (3 sets)

Position Unit (ROBOT-1~3): Mitsubishi AD71

3. Missing Parts: Heating Exchange KOMATSU E-332B-6 (1 set)