2002 STS Multiplex CVD 100mm

The tool is currently operational and in good condition. 

Year 2002

Multiplex single chamber PECVD with carousel loadlock.

Edwards iQDP80/QMB1200 chamber pump

Edwards E2M40 PFPE LL pump

LF/HF generators to shower head

MFCs: N2,02,CF4,N20,SiH4, NH3, 10% PH3 in N2, 10% B2H6 in N2, Ge.

SMC chiller

MKS throttle

Win XP SP3

STS software upgraded to Trinity version in 2015