2003 Nikon 4425i 200mm Stepper

2003 Nikon 4425i 200mm Stepper
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Description
With WL3 upgrade and Nest-V computer upgrade and good data
Machine is fully running
Loading and aligning reticles and wafers no problem and the uniformity off the tool is good
and so is the power off it.
The lens when it was in production the distortion was just on spec and there was some tilt in the lens but when the tilt in the lens was taken out and the tiny adjustments done on the lens the distortion and inclination came down to less than half of spec.
Specifications
| Manufacturer | Nikon |
| Model | 4425i 200mm Stepper |
| Year | 2003 |
| Condition | Used |
| Stock Number | BM3079 |
| Wavelength | 365 nm |
| Type | WF Stepper |
| Platform | WF |
| Resolution, nm | ≦ 700 |
| Overlay | 100 nm |
| Exposure light source | i-line |
| Reduction ration | 1:2.5 |
| Exposure Field | 44 mm x 44 mm |
| Alignment accuracy (EGA, |M| + 3σ) | ≦ 100 nm |










