2003 Nikon 4425i 200mm Stepper

2003 Nikon 4425i 200mm Stepper

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Description

With WL3 upgrade and Nest-V computer upgrade and good data

Machine is fully running

Loading and aligning reticles and wafers no problem and the uniformity off the tool is good

and so is the power off it.

The lens when it was in production the distortion was just on spec and there was some tilt in the lens but when the tilt in the lens was taken out and the tiny adjustments done on the lens the distortion and inclination came down to less than half of spec.

Specifications

ManufacturerNikon
Model4425i 200mm Stepper
Year2003
ConditionUsed
Stock NumberBM3079
Wavelength365 nm
TypeWF Stepper
PlatformWF
Resolution, nm≦ 700
Overlay100 nm
Exposure light sourcei-line
Reduction ration1:2.5
Exposure Field44 mm x 44 mm
Alignment accuracy (EGA, |M| + 3σ)≦ 100 nm